Semitool WST or Single solution systems - (Fresh Only) w/tank

heater & controller.

Facilities: Exhaust: 100 SCFM DI Water:2
gal/min @ 35 psi N2: 5 SCFM @40 psi Air:
2SCFM @ 50 psi Chilled Water: 2 gal/min
@30psi Requirements 208V., 60 Hz., 3 phase,
30 A